Integrated microfluidic variable optical attenuator.

We fabricate and measure a microfluidic variable optical attenuator, which consists of an optical waveguide integrated with a microfluidic channel. An opening is introduced in the upper cladding of the waveguide in order to facilitate the alignment and bonding of the microfluidic channel. By using fluids with different refractive indices, the optical output power is gradually attenuated. We obtain a maximum attenuation of 28 dB when the fluid refractive index changes from 1.557 to 1.584.